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Nikon Wins NEDO Support for Advanced Chip Packaging Lithography Development

By Public Technologies
  • Nikon selected for NEDO subsidy project to develop a high-resolution digital lithography system for advanced semiconductor packaging.
  • System targets 0.5 µm resolution with overlay accuracy of ±0.15 µm or better.
  • Energy consumption targeted to fall 50% compared with conventional systems.


Disclaimer: This news brief was created by Public Technologies (PUBT) using generative artificial intelligence. While PUBT strives to provide accurate and timely information, this AI-generated content is for informational purposes only and should not be interpreted as financial, investment, or legal advice. Nikon Corporation published the original content used to generate this news brief on October 20, 2026, and is solely responsible for the information contained therein.

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